7/8/2010	9:14:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	9:14:02 AM	Recipe started at 9:14 AM
7/8/2010	9:14:02 AM	H2 valve closed
7/8/2010	9:14:02 AM	BCl3 valve closed
7/8/2010	9:14:02 AM	PH3 valve closed
7/8/2010	9:14:02 AM	SiCl4 pre valve closed
7/8/2010	9:14:02 AM	SiCl4 post valve closed
7/8/2010	9:14:02 AM	Main Vac valve closed
7/8/2010	9:14:02 AM	Bypass valve closed
7/8/2010	9:14:02 AM	Bubbler valve closed
7/8/2010	9:14:02 AM	Helium valve opened
7/8/2010	9:14:02 AM	Helium MFC set to  500.000000
7/8/2010	9:14:02 AM	H2 MFC set to  0.000000
7/8/2010	9:14:02 AM	BCl3 MFC set to  0.000000
7/8/2010	9:14:02 AM	PHl3 MFC set to  0.000000
7/8/2010	9:14:02 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:14:02 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:14:03 AM	Tube furnace set to 0
7/8/2010	9:15:23 AM	Helium valve closed
7/8/2010	9:15:23 AM	H2 valve closed
7/8/2010	9:15:23 AM	BCl3 valve closed
7/8/2010	9:15:23 AM	PH3 valve closed
7/8/2010	9:15:23 AM	SiCl4 pre valve closed
7/8/2010	9:15:23 AM	SiCl4 post valve closed
7/8/2010	9:15:23 AM	Main Vac valve closed
7/8/2010	9:15:23 AM	Bypass valve closed
7/8/2010	9:15:23 AM	Bubbler valve closed
7/8/2010	9:15:23 AM	Helium MFC set to  0.000000
7/8/2010	9:15:23 AM	H2 MFC set to  0.000000
7/8/2010	9:15:23 AM	BCl3 MFC set to  0.000000
7/8/2010	9:15:23 AM	PHl3 MFC set to  0.000000
7/8/2010	9:15:23 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:15:23 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:15:23 AM	Tube furnace set to 0
7/8/2010	9:15:23 AM	Run finished at 9:15 AM
7/8/2010	9:15:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	9:18:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	9:18:20 AM	Recipe started at 9:18 AM
7/8/2010	9:18:20 AM	Helium valve closed
7/8/2010	9:18:20 AM	H2 valve closed
7/8/2010	9:18:20 AM	BCl3 valve closed
7/8/2010	9:18:20 AM	PH3 valve closed
7/8/2010	9:18:20 AM	SiCl4 pre valve closed
7/8/2010	9:18:20 AM	SiCl4 post valve closed
7/8/2010	9:18:20 AM	Main Vac valve closed
7/8/2010	9:18:20 AM	Bubbler valve closed
7/8/2010	9:18:20 AM	Bypass valve opened
7/8/2010	9:18:20 AM	Helium MFC set to  0.000000
7/8/2010	9:18:20 AM	H2 MFC set to  0.000000
7/8/2010	9:18:20 AM	BCl3 MFC set to  0.000000
7/8/2010	9:18:20 AM	PHl3 MFC set to  0.000000
7/8/2010	9:18:20 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:18:20 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:18:20 AM	Tube furnace set to 0
7/8/2010	9:19:08 AM	Helium valve closed
7/8/2010	9:19:08 AM	H2 valve closed
7/8/2010	9:19:08 AM	BCl3 valve closed
7/8/2010	9:19:08 AM	PH3 valve closed
7/8/2010	9:19:08 AM	SiCl4 pre valve closed
7/8/2010	9:19:08 AM	SiCl4 post valve closed
7/8/2010	9:19:08 AM	Bubbler valve closed
7/8/2010	9:19:08 AM	Main Vac valve opened
7/8/2010	9:19:08 AM	Bypass valve opened
7/8/2010	9:19:08 AM	Helium MFC set to  0.000000
7/8/2010	9:19:08 AM	H2 MFC set to  0.000000
7/8/2010	9:19:08 AM	BCl3 MFC set to  0.000000
7/8/2010	9:19:08 AM	PHl3 MFC set to  0.000000
7/8/2010	9:19:08 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:19:08 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:19:08 AM	Tube furnace set to 0
7/8/2010	9:19:08 AM	Run finished at 9:19 AM
7/8/2010	9:19:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	9:34:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	9:34:44 AM	Recipe started at 9:34 AM
7/8/2010	9:34:44 AM	H2 valve closed
7/8/2010	9:34:44 AM	BCl3 valve closed
7/8/2010	9:34:44 AM	PH3 valve closed
7/8/2010	9:34:44 AM	SiCl4 pre valve closed
7/8/2010	9:34:44 AM	SiCl4 post valve closed
7/8/2010	9:34:44 AM	Main Vac valve closed
7/8/2010	9:34:44 AM	Bypass valve closed
7/8/2010	9:34:44 AM	Bubbler valve closed
7/8/2010	9:34:44 AM	Helium valve opened
7/8/2010	9:34:44 AM	Helium MFC set to  500.000000
7/8/2010	9:34:44 AM	H2 MFC set to  0.000000
7/8/2010	9:34:44 AM	BCl3 MFC set to  0.000000
7/8/2010	9:34:44 AM	PHl3 MFC set to  0.000000
7/8/2010	9:34:44 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:34:44 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:34:44 AM	Tube furnace set to 0
7/8/2010	9:36:05 AM	Helium valve closed
7/8/2010	9:36:05 AM	H2 valve closed
7/8/2010	9:36:05 AM	BCl3 valve closed
7/8/2010	9:36:05 AM	PH3 valve closed
7/8/2010	9:36:05 AM	SiCl4 pre valve closed
7/8/2010	9:36:05 AM	SiCl4 post valve closed
7/8/2010	9:36:05 AM	Main Vac valve closed
7/8/2010	9:36:05 AM	Bypass valve closed
7/8/2010	9:36:05 AM	Bubbler valve closed
7/8/2010	9:36:05 AM	Helium MFC set to  0.000000
7/8/2010	9:36:05 AM	H2 MFC set to  0.000000
7/8/2010	9:36:05 AM	BCl3 MFC set to  0.000000
7/8/2010	9:36:05 AM	PHl3 MFC set to  0.000000
7/8/2010	9:36:05 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:36:05 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:36:05 AM	Tube furnace set to 0
7/8/2010	9:36:06 AM	Run finished at 9:36 AM
7/8/2010	9:36:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	9:38:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	9:38:07 AM	Recipe started at 9:38 AM
7/8/2010	9:38:07 AM	Helium valve closed
7/8/2010	9:38:07 AM	H2 valve closed
7/8/2010	9:38:07 AM	BCl3 valve closed
7/8/2010	9:38:07 AM	PH3 valve closed
7/8/2010	9:38:07 AM	SiCl4 pre valve closed
7/8/2010	9:38:07 AM	SiCl4 post valve closed
7/8/2010	9:38:07 AM	Main Vac valve closed
7/8/2010	9:38:07 AM	Bubbler valve closed
7/8/2010	9:38:07 AM	Bypass valve opened
7/8/2010	9:38:07 AM	Helium MFC set to  0.000000
7/8/2010	9:38:07 AM	H2 MFC set to  0.000000
7/8/2010	9:38:07 AM	BCl3 MFC set to  0.000000
7/8/2010	9:38:07 AM	PHl3 MFC set to  0.000000
7/8/2010	9:38:07 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:38:07 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:38:07 AM	Tube furnace set to 0
7/8/2010	9:38:54 AM	Helium valve closed
7/8/2010	9:38:54 AM	H2 valve closed
7/8/2010	9:38:54 AM	BCl3 valve closed
7/8/2010	9:38:54 AM	PH3 valve closed
7/8/2010	9:38:54 AM	SiCl4 pre valve closed
7/8/2010	9:38:55 AM	SiCl4 post valve closed
7/8/2010	9:38:55 AM	Bubbler valve closed
7/8/2010	9:38:55 AM	Main Vac valve opened
7/8/2010	9:38:55 AM	Bypass valve opened
7/8/2010	9:38:55 AM	Helium MFC set to  0.000000
7/8/2010	9:38:55 AM	H2 MFC set to  0.000000
7/8/2010	9:38:55 AM	BCl3 MFC set to  0.000000
7/8/2010	9:38:55 AM	PHl3 MFC set to  0.000000
7/8/2010	9:38:55 AM	SiCl4 MFC set to  0.000000
7/8/2010	9:38:55 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:38:55 AM	Tube furnace set to 0
7/8/2010	9:38:55 AM	Run finished at 9:38 AM
7/8/2010	9:38:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	9:44:34 AM	Helium MFC set to  75.000000
7/8/2010	9:44:35 AM	Helium valve opened
7/8/2010	9:51:04 AM	Helium valve closed
7/8/2010	9:52:37 AM	Helium valve opened
7/8/2010	10:11:51 AM	Helium valve closed
7/8/2010	10:14:59 AM	Recipe started at 10:14 AM
7/8/2010	10:14:59 AM	Helium valve closed
7/8/2010	10:14:59 AM	BCl3 valve closed
7/8/2010	10:14:59 AM	PH3 valve closed
7/8/2010	10:14:59 AM	SiCl4 pre valve closed
7/8/2010	10:14:59 AM	SiCl4 post valve closed
7/8/2010	10:14:59 AM	Main Vac valve closed
7/8/2010	10:14:59 AM	Bypass valve closed
7/8/2010	10:14:59 AM	Bubbler valve closed
7/8/2010	10:14:59 AM	H2 valve opened
7/8/2010	10:14:59 AM	Helium MFC set to  0.000000
7/8/2010	10:14:59 AM	H2 MFC set to  500.000000
7/8/2010	10:14:59 AM	BCl3 MFC set to  0.000000
7/8/2010	10:14:59 AM	PHl3 MFC set to  0.000000
7/8/2010	10:14:59 AM	SiCl4 MFC set to  0.000000
7/8/2010	10:14:59 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:14:59 AM	Tube furnace set to 0
7/8/2010	10:16:22 AM	Helium valve closed
7/8/2010	10:16:22 AM	BCl3 valve closed
7/8/2010	10:16:22 AM	PH3 valve closed
7/8/2010	10:16:22 AM	SiCl4 pre valve closed
7/8/2010	10:16:22 AM	SiCl4 post valve closed
7/8/2010	10:16:22 AM	Main Vac valve closed
7/8/2010	10:16:22 AM	Bypass valve closed
7/8/2010	10:16:22 AM	H2 valve opened
7/8/2010	10:16:22 AM	Bubbler valve opened
7/8/2010	10:16:22 AM	Helium MFC set to  0.000000
7/8/2010	10:16:22 AM	H2 MFC set to  500.000000
7/8/2010	10:16:22 AM	BCl3 MFC set to  0.000000
7/8/2010	10:16:22 AM	PHl3 MFC set to  0.000000
7/8/2010	10:16:22 AM	SiCl4 MFC set to  0.000000
7/8/2010	10:16:22 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:16:23 AM	Tube furnace set to 1000
7/8/2010	10:36:23 AM	Helium valve closed
7/8/2010	10:36:23 AM	BCl3 valve closed
7/8/2010	10:36:23 AM	PH3 valve closed
7/8/2010	10:36:23 AM	Main Vac valve closed
7/8/2010	10:36:23 AM	Bypass valve closed
7/8/2010	10:36:23 AM	H2 valve opened
7/8/2010	10:36:23 AM	SiCl4 pre valve opened
7/8/2010	10:36:23 AM	SiCl4 post valve opened
7/8/2010	10:36:23 AM	Bubbler valve opened
7/8/2010	10:36:23 AM	Helium MFC set to  0.000000
7/8/2010	10:36:23 AM	H2 MFC set to  500.000000
7/8/2010	10:36:23 AM	BCl3 MFC set to  0.000000
7/8/2010	10:36:23 AM	PHl3 MFC set to  0.000000
7/8/2010	10:36:23 AM	Error setting the  SiCl4 MFC to 325.000000
7/8/2010	10:43:28 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:43:28 AM	Tube furnace set to 1000
7/8/2010	10:43:33 AM	Run aborted at 10:43 AM
7/8/2010	10:43:33 AM	Helium valve closed
7/8/2010	10:43:33 AM	H2 valve closed
7/8/2010	10:43:33 AM	BCl3 valve closed
7/8/2010	10:43:33 AM	PH3 valve closed
7/8/2010	10:43:33 AM	SiCl4 pre valve closed
7/8/2010	10:43:33 AM	SiCl4 post valve closed
7/8/2010	10:43:33 AM	Bypass valve closed
7/8/2010	10:43:33 AM	Main Vac valve closed
7/8/2010	10:43:33 AM	Bubbler valve closed
7/8/2010	10:43:33 AM	Helium MFC set to  0.000000
7/8/2010	10:43:33 AM	H2 MFC set to  0.000000
7/8/2010	10:43:33 AM	BCl3 MFC set to  0.000000
7/8/2010	10:43:33 AM	PHl3 MFC set to  0.000000
7/8/2010	10:43:33 AM	SiCl4 MFC set to  0.000000
7/8/2010	10:43:33 AM	Tube furnace set to 0
7/8/2010	10:43:38 AM	Program exited cleanly
7/8/2010	10:45:23 AM	Program started normally
7/8/2010	10:45:23 AM	Helium valve closed
7/8/2010	10:45:23 AM	H2 valve closed
7/8/2010	10:45:23 AM	BCl3 valve closed
7/8/2010	10:45:23 AM	PH3 valve closed
7/8/2010	10:45:23 AM	SiCl4 pre valve closed
7/8/2010	10:45:23 AM	SiCl4 post valve closed
7/8/2010	10:45:23 AM	Main Vac valve closed
7/8/2010	10:45:23 AM	Bypass valve closed
7/8/2010	10:45:23 AM	Bubbler valve closed
7/8/2010	10:45:23 AM	Helium MFC set to  0.000000
7/8/2010	10:45:23 AM	H2 MFC set to  0.000000
7/8/2010	10:45:23 AM	BCl3 MFC set to  0.000000
7/8/2010	10:45:23 AM	PHl3 MFC set to  0.000000
7/8/2010	10:45:23 AM	SiCl4 MFC set to  0.000000
7/8/2010	10:45:23 AM	Bypass solenoid MFC set to  760.000000
7/8/2010	10:45:23 AM	Tube furnace set to 0
7/8/2010	10:45:28 AM	Tube furnace set to 1000
7/8/2010	10:45:35 AM	H2 MFC set to  500.000000
7/8/2010	10:45:39 AM	H2 valve opened
7/8/2010	10:45:42 AM	Bubbler valve opened
7/8/2010	10:46:32 AM	Recipe started at 10:46 AM
7/8/2010	10:46:32 AM	Helium valve closed
7/8/2010	10:46:32 AM	BCl3 valve closed
7/8/2010	10:46:32 AM	PH3 valve closed
7/8/2010	10:46:32 AM	SiCl4 pre valve closed
7/8/2010	10:46:32 AM	SiCl4 post valve closed
7/8/2010	10:46:32 AM	Main Vac valve closed
7/8/2010	10:46:32 AM	Bypass valve closed
7/8/2010	10:46:32 AM	Bubbler valve closed
7/8/2010	10:46:32 AM	H2 valve opened
7/8/2010	10:46:32 AM	Helium MFC set to  0.000000
7/8/2010	10:46:32 AM	H2 MFC set to  500.000000
7/8/2010	10:46:32 AM	BCl3 MFC set to  0.000000
7/8/2010	10:46:32 AM	PHl3 MFC set to  0.000000
7/8/2010	10:46:32 AM	SiCl4 MFC set to  0.000000
7/8/2010	10:46:32 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:46:33 AM	Tube furnace set to 0
7/8/2010	10:46:34 AM	Helium valve closed
7/8/2010	10:46:34 AM	BCl3 valve closed
7/8/2010	10:46:34 AM	PH3 valve closed
7/8/2010	10:46:34 AM	SiCl4 pre valve closed
7/8/2010	10:46:34 AM	SiCl4 post valve closed
7/8/2010	10:46:34 AM	Main Vac valve closed
7/8/2010	10:46:34 AM	Bypass valve closed
7/8/2010	10:46:34 AM	H2 valve opened
7/8/2010	10:46:34 AM	Bubbler valve opened
7/8/2010	10:46:34 AM	Helium MFC set to  0.000000
7/8/2010	10:46:34 AM	H2 MFC set to  500.000000
7/8/2010	10:46:34 AM	BCl3 MFC set to  0.000000
7/8/2010	10:46:34 AM	PHl3 MFC set to  0.000000
7/8/2010	10:46:34 AM	SiCl4 MFC set to  0.000000
7/8/2010	10:46:34 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:46:34 AM	Tube furnace set to 1000
7/8/2010	10:52:22 AM	Helium valve closed
7/8/2010	10:52:22 AM	BCl3 valve closed
7/8/2010	10:52:22 AM	PH3 valve closed
7/8/2010	10:52:22 AM	Main Vac valve closed
7/8/2010	10:52:22 AM	Bypass valve closed
7/8/2010	10:52:22 AM	H2 valve opened
7/8/2010	10:52:22 AM	SiCl4 pre valve opened
7/8/2010	10:52:22 AM	SiCl4 post valve opened
7/8/2010	10:52:22 AM	Bubbler valve opened
7/8/2010	10:52:22 AM	Helium MFC set to  0.000000
7/8/2010	10:52:22 AM	H2 MFC set to  500.000000
7/8/2010	10:52:22 AM	BCl3 MFC set to  0.000000
7/8/2010	10:52:22 AM	PHl3 MFC set to  0.000000
7/8/2010	10:52:22 AM	Error setting the  SiCl4 MFC to 325.000000
7/8/2010	10:52:29 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:52:29 AM	Tube furnace set to 1000
7/8/2010	11:12:22 AM	H2 valve closed
7/8/2010	11:12:22 AM	BCl3 valve closed
7/8/2010	11:12:22 AM	PH3 valve closed
7/8/2010	11:12:22 AM	SiCl4 pre valve closed
7/8/2010	11:12:22 AM	SiCl4 post valve closed
7/8/2010	11:12:22 AM	Main Vac valve closed
7/8/2010	11:12:22 AM	Bypass valve closed
7/8/2010	11:12:22 AM	Helium valve opened
7/8/2010	11:12:22 AM	Bubbler valve opened
7/8/2010	11:12:22 AM	Helium MFC set to  500.000000
7/8/2010	11:12:22 AM	H2 MFC set to  0.000000
7/8/2010	11:12:22 AM	BCl3 MFC set to  0.000000
7/8/2010	11:12:22 AM	PHl3 MFC set to  0.000000
7/8/2010	11:12:22 AM	SiCl4 MFC set to  0.000000
7/8/2010	11:12:22 AM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:12:22 AM	Tube furnace set to 750
7/8/2010	11:19:43 AM	Run aborted at 11:19 AM
7/8/2010	11:19:43 AM	Helium valve closed
7/8/2010	11:19:43 AM	H2 valve closed
7/8/2010	11:19:43 AM	BCl3 valve closed
7/8/2010	11:19:43 AM	PH3 valve closed
7/8/2010	11:19:43 AM	SiCl4 pre valve closed
7/8/2010	11:19:43 AM	SiCl4 post valve closed
7/8/2010	11:19:43 AM	Bypass valve closed
7/8/2010	11:19:43 AM	Main Vac valve closed
7/8/2010	11:19:43 AM	Bubbler valve closed
7/8/2010	11:19:43 AM	Helium MFC set to  0.000000
7/8/2010	11:19:43 AM	H2 MFC set to  0.000000
7/8/2010	11:19:43 AM	BCl3 MFC set to  0.000000
7/8/2010	11:19:43 AM	PHl3 MFC set to  0.000000
7/8/2010	11:19:43 AM	SiCl4 MFC set to  0.000000
7/8/2010	11:19:43 AM	Tube furnace set to 0
7/8/2010	11:19:59 AM	SiCl4 MFC set to  50.000000
7/8/2010	11:20:14 AM	SiCl4 MFC set to  0.000000
7/8/2010	11:23:46 AM	SiCl4 MFC set to  50.000000
7/8/2010	11:23:53 AM	SiCl4 MFC set to  0.000000
7/8/2010	11:24:00 AM	SiCl4 pre valve opened
7/8/2010	11:24:01 AM	SiCl4 pre valve closed
7/8/2010	11:24:01 AM	SiCl4 pre valve opened
7/8/2010	11:24:02 AM	SiCl4 pre valve closed
7/8/2010	11:29:38 AM	Helium valve opened
7/8/2010	11:29:43 AM	Helium MFC set to  50.000000
7/8/2010	11:30:26 AM	Helium valve closed
7/8/2010	1:03:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	1:03:58 PM	Recipe started at 1:03 PM
7/8/2010	1:03:58 PM	H2 valve closed
7/8/2010	1:03:58 PM	BCl3 valve closed
7/8/2010	1:03:58 PM	PH3 valve closed
7/8/2010	1:03:58 PM	SiCl4 pre valve closed
7/8/2010	1:03:58 PM	SiCl4 post valve closed
7/8/2010	1:03:58 PM	Main Vac valve closed
7/8/2010	1:03:58 PM	Bypass valve closed
7/8/2010	1:03:58 PM	Bubbler valve closed
7/8/2010	1:03:58 PM	Helium valve opened
7/8/2010	1:03:58 PM	Helium MFC set to  500.000000
7/8/2010	1:03:58 PM	H2 MFC set to  0.000000
7/8/2010	1:03:58 PM	BCl3 MFC set to  0.000000
7/8/2010	1:03:58 PM	PHl3 MFC set to  0.000000
7/8/2010	1:03:58 PM	SiCl4 MFC set to  0.000000
7/8/2010	1:03:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:03:58 PM	Tube furnace set to 0
7/8/2010	1:04:05 PM	Helium valve closed
7/8/2010	1:04:05 PM	H2 valve closed
7/8/2010	1:04:05 PM	BCl3 valve closed
7/8/2010	1:04:05 PM	PH3 valve closed
7/8/2010	1:04:05 PM	SiCl4 pre valve closed
7/8/2010	1:04:05 PM	SiCl4 post valve closed
7/8/2010	1:04:05 PM	Main Vac valve closed
7/8/2010	1:04:05 PM	Bypass valve closed
7/8/2010	1:04:05 PM	Bubbler valve closed
7/8/2010	1:04:05 PM	Helium MFC set to  0.000000
7/8/2010	1:04:05 PM	H2 MFC set to  0.000000
7/8/2010	1:04:05 PM	BCl3 MFC set to  0.000000
7/8/2010	1:04:05 PM	PHl3 MFC set to  0.000000
7/8/2010	1:04:05 PM	SiCl4 MFC set to  0.000000
7/8/2010	1:04:05 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:04:05 PM	Tube furnace set to 0
7/8/2010	1:04:06 PM	Run finished at 1:04 PM
7/8/2010	1:04:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	1:09:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	1:09:35 PM	Recipe started at 1:09 PM
7/8/2010	1:09:35 PM	Helium valve closed
7/8/2010	1:09:35 PM	H2 valve closed
7/8/2010	1:09:35 PM	BCl3 valve closed
7/8/2010	1:09:35 PM	PH3 valve closed
7/8/2010	1:09:35 PM	SiCl4 pre valve closed
7/8/2010	1:09:35 PM	SiCl4 post valve closed
7/8/2010	1:09:35 PM	Main Vac valve closed
7/8/2010	1:09:35 PM	Bubbler valve closed
7/8/2010	1:09:35 PM	Bypass valve opened
7/8/2010	1:09:35 PM	Helium MFC set to  0.000000
7/8/2010	1:09:35 PM	H2 MFC set to  0.000000
7/8/2010	1:09:35 PM	BCl3 MFC set to  0.000000
7/8/2010	1:09:35 PM	PHl3 MFC set to  0.000000
7/8/2010	1:09:35 PM	SiCl4 MFC set to  0.000000
7/8/2010	1:09:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:09:36 PM	Tube furnace set to 0
7/8/2010	1:10:24 PM	Helium valve closed
7/8/2010	1:10:24 PM	H2 valve closed
7/8/2010	1:10:24 PM	BCl3 valve closed
7/8/2010	1:10:24 PM	PH3 valve closed
7/8/2010	1:10:24 PM	SiCl4 pre valve closed
7/8/2010	1:10:24 PM	SiCl4 post valve closed
7/8/2010	1:10:24 PM	Bubbler valve closed
7/8/2010	1:10:24 PM	Main Vac valve opened
7/8/2010	1:10:24 PM	Bypass valve opened
7/8/2010	1:10:24 PM	Helium MFC set to  0.000000
7/8/2010	1:10:24 PM	H2 MFC set to  0.000000
7/8/2010	1:10:24 PM	BCl3 MFC set to  0.000000
7/8/2010	1:10:24 PM	PHl3 MFC set to  0.000000
7/8/2010	1:10:24 PM	SiCl4 MFC set to  0.000000
7/8/2010	1:10:24 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:10:24 PM	Tube furnace set to 0
7/8/2010	1:10:24 PM	Run finished at 1:10 PM
7/8/2010	1:10:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	1:10:38 PM	Helium valve opened
7/8/2010	1:10:42 PM	Helium MFC set to  75.000000
7/8/2010	1:14:11 PM	Helium valve closed
7/8/2010	1:14:43 PM	Helium valve opened
7/8/2010	1:29:46 PM	Helium valve closed
7/8/2010	1:32:01 PM	Helium valve opened
7/8/2010	1:32:09 PM	Helium valve closed
7/8/2010	1:32:14 PM	Helium valve opened
7/8/2010	1:32:22 PM	Helium valve closed
7/8/2010	1:36:17 PM	Recipe started at 1:36 PM
7/8/2010	1:36:17 PM	Helium valve closed
7/8/2010	1:36:17 PM	BCl3 valve closed
7/8/2010	1:36:17 PM	PH3 valve closed
7/8/2010	1:36:17 PM	SiCl4 pre valve closed
7/8/2010	1:36:17 PM	SiCl4 post valve closed
7/8/2010	1:36:17 PM	Main Vac valve closed
7/8/2010	1:36:18 PM	Bypass valve closed
7/8/2010	1:36:18 PM	Bubbler valve closed
7/8/2010	1:36:18 PM	H2 valve opened
7/8/2010	1:36:18 PM	Helium MFC set to  0.000000
7/8/2010	1:36:18 PM	H2 MFC set to  500.000000
7/8/2010	1:36:18 PM	BCl3 MFC set to  0.000000
7/8/2010	1:36:18 PM	PHl3 MFC set to  0.000000
7/8/2010	1:36:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	1:36:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:36:18 PM	Tube furnace set to 1000
7/8/2010	1:37:39 PM	Helium valve closed
7/8/2010	1:37:39 PM	BCl3 valve closed
7/8/2010	1:37:39 PM	PH3 valve closed
7/8/2010	1:37:39 PM	SiCl4 pre valve closed
7/8/2010	1:37:39 PM	SiCl4 post valve closed
7/8/2010	1:37:39 PM	Main Vac valve closed
7/8/2010	1:37:39 PM	Bypass valve closed
7/8/2010	1:37:39 PM	H2 valve opened
7/8/2010	1:37:39 PM	Bubbler valve opened
7/8/2010	1:37:39 PM	Helium MFC set to  0.000000
7/8/2010	1:37:39 PM	H2 MFC set to  500.000000
7/8/2010	1:37:39 PM	BCl3 MFC set to  0.000000
7/8/2010	1:37:39 PM	PHl3 MFC set to  0.000000
7/8/2010	1:37:39 PM	SiCl4 MFC set to  0.000000
7/8/2010	1:37:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:37:39 PM	Tube furnace set to 1000
7/8/2010	1:57:39 PM	Helium valve closed
7/8/2010	1:57:39 PM	BCl3 valve closed
7/8/2010	1:57:39 PM	PH3 valve closed
7/8/2010	1:57:39 PM	Main Vac valve closed
7/8/2010	1:57:39 PM	Bypass valve closed
7/8/2010	1:57:39 PM	H2 valve opened
7/8/2010	1:57:39 PM	SiCl4 pre valve opened
7/8/2010	1:57:39 PM	SiCl4 post valve opened
7/8/2010	1:57:39 PM	Bubbler valve opened
7/8/2010	1:57:39 PM	Helium MFC set to  0.000000
7/8/2010	1:57:39 PM	H2 MFC set to  500.000000
7/8/2010	1:57:39 PM	BCl3 MFC set to  0.000000
7/8/2010	1:57:39 PM	PHl3 MFC set to  0.000000
7/8/2010	1:57:39 PM	SiCl4 MFC set to  50.000000
7/8/2010	1:57:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	1:57:39 PM	Tube furnace set to 1000
7/8/2010	2:12:39 PM	Helium valve closed
7/8/2010	2:12:39 PM	BCl3 valve closed
7/8/2010	2:12:39 PM	PH3 valve closed
7/8/2010	2:12:39 PM	SiCl4 pre valve closed
7/8/2010	2:12:39 PM	SiCl4 post valve closed
7/8/2010	2:12:39 PM	Main Vac valve closed
7/8/2010	2:12:39 PM	Bypass valve closed
7/8/2010	2:12:39 PM	H2 valve opened
7/8/2010	2:12:39 PM	Bubbler valve opened
7/8/2010	2:12:39 PM	Helium MFC set to  0.000000
7/8/2010	2:12:39 PM	H2 MFC set to  500.000000
7/8/2010	2:12:39 PM	BCl3 MFC set to  0.000000
7/8/2010	2:12:39 PM	PHl3 MFC set to  0.000000
7/8/2010	2:12:39 PM	SiCl4 MFC set to  0.000000
7/8/2010	2:12:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	2:12:39 PM	Tube furnace set to 750
7/8/2010	2:32:39 PM	H2 valve closed
7/8/2010	2:32:39 PM	BCl3 valve closed
7/8/2010	2:32:39 PM	PH3 valve closed
7/8/2010	2:32:39 PM	SiCl4 pre valve closed
7/8/2010	2:32:39 PM	SiCl4 post valve closed
7/8/2010	2:32:39 PM	Main Vac valve closed
7/8/2010	2:32:39 PM	Bypass valve closed
7/8/2010	2:32:39 PM	Helium valve opened
7/8/2010	2:32:39 PM	Bubbler valve opened
7/8/2010	2:32:39 PM	Helium MFC set to  500.000000
7/8/2010	2:32:39 PM	H2 MFC set to  0.000000
7/8/2010	2:32:39 PM	BCl3 MFC set to  0.000000
7/8/2010	2:32:39 PM	PHl3 MFC set to  0.000000
7/8/2010	2:32:39 PM	SiCl4 MFC set to  0.000000
7/8/2010	2:32:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	2:32:39 PM	Tube furnace set to 0
7/8/2010	2:52:39 PM	Helium valve closed
7/8/2010	2:52:39 PM	H2 valve closed
7/8/2010	2:52:39 PM	BCl3 valve closed
7/8/2010	2:52:39 PM	PH3 valve closed
7/8/2010	2:52:39 PM	SiCl4 pre valve closed
7/8/2010	2:52:39 PM	SiCl4 post valve closed
7/8/2010	2:52:39 PM	Main Vac valve closed
7/8/2010	2:52:39 PM	Bypass valve closed
7/8/2010	2:52:39 PM	Bubbler valve closed
7/8/2010	2:52:39 PM	Helium MFC set to  0.000000
7/8/2010	2:52:39 PM	H2 MFC set to  0.000000
7/8/2010	2:52:39 PM	BCl3 MFC set to  0.000000
7/8/2010	2:52:39 PM	PHl3 MFC set to  0.000000
7/8/2010	2:52:39 PM	SiCl4 MFC set to  0.000000
7/8/2010	2:52:39 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	2:52:39 PM	Tube furnace set to 0
7/8/2010	2:52:40 PM	Run finished at 2:52 PM
7/8/2010	3:46:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	3:46:02 PM	Recipe started at 3:46 PM
7/8/2010	3:46:02 PM	H2 valve closed
7/8/2010	3:46:02 PM	BCl3 valve closed
7/8/2010	3:46:02 PM	PH3 valve closed
7/8/2010	3:46:02 PM	SiCl4 pre valve closed
7/8/2010	3:46:02 PM	SiCl4 post valve closed
7/8/2010	3:46:02 PM	Main Vac valve closed
7/8/2010	3:46:02 PM	Bypass valve closed
7/8/2010	3:46:02 PM	Bubbler valve closed
7/8/2010	3:46:02 PM	Helium valve opened
7/8/2010	3:46:02 PM	Helium MFC set to  500.000000
7/8/2010	3:46:02 PM	H2 MFC set to  0.000000
7/8/2010	3:46:02 PM	BCl3 MFC set to  0.000000
7/8/2010	3:46:02 PM	PHl3 MFC set to  0.000000
7/8/2010	3:46:02 PM	SiCl4 MFC set to  0.000000
7/8/2010	3:46:02 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	3:46:02 PM	Tube furnace set to 0
7/8/2010	3:46:08 PM	Helium valve closed
7/8/2010	3:46:08 PM	H2 valve closed
7/8/2010	3:46:08 PM	BCl3 valve closed
7/8/2010	3:46:08 PM	PH3 valve closed
7/8/2010	3:46:08 PM	SiCl4 pre valve closed
7/8/2010	3:46:08 PM	SiCl4 post valve closed
7/8/2010	3:46:08 PM	Main Vac valve closed
7/8/2010	3:46:08 PM	Bypass valve closed
7/8/2010	3:46:08 PM	Bubbler valve closed
7/8/2010	3:46:08 PM	Helium MFC set to  0.000000
7/8/2010	3:46:08 PM	H2 MFC set to  0.000000
7/8/2010	3:46:08 PM	BCl3 MFC set to  0.000000
7/8/2010	3:46:08 PM	PHl3 MFC set to  0.000000
7/8/2010	3:46:08 PM	SiCl4 MFC set to  0.000000
7/8/2010	3:46:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	3:46:09 PM	Tube furnace set to 0
7/8/2010	3:46:09 PM	Run finished at 3:46 PM
7/8/2010	3:46:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/8/2010	3:52:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	3:52:54 PM	Recipe started at 3:52 PM
7/8/2010	3:52:54 PM	Helium valve closed
7/8/2010	3:52:54 PM	H2 valve closed
7/8/2010	3:52:54 PM	BCl3 valve closed
7/8/2010	3:52:54 PM	PH3 valve closed
7/8/2010	3:52:54 PM	SiCl4 pre valve closed
7/8/2010	3:52:54 PM	SiCl4 post valve closed
7/8/2010	3:52:54 PM	Main Vac valve closed
7/8/2010	3:52:54 PM	Bubbler valve closed
7/8/2010	3:52:54 PM	Bypass valve opened
7/8/2010	3:52:54 PM	Helium MFC set to  0.000000
7/8/2010	3:52:54 PM	H2 MFC set to  0.000000
7/8/2010	3:52:54 PM	BCl3 MFC set to  0.000000
7/8/2010	3:52:54 PM	PHl3 MFC set to  0.000000
7/8/2010	3:52:54 PM	SiCl4 MFC set to  0.000000
7/8/2010	3:52:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	3:52:54 PM	Tube furnace set to 0
7/8/2010	3:53:43 PM	Helium valve closed
7/8/2010	3:53:43 PM	H2 valve closed
7/8/2010	3:53:43 PM	BCl3 valve closed
7/8/2010	3:53:43 PM	PH3 valve closed
7/8/2010	3:53:43 PM	SiCl4 pre valve closed
7/8/2010	3:53:43 PM	SiCl4 post valve closed
7/8/2010	3:53:43 PM	Bubbler valve closed
7/8/2010	3:53:43 PM	Main Vac valve opened
7/8/2010	3:53:43 PM	Bypass valve opened
7/8/2010	3:53:43 PM	Helium MFC set to  0.000000
7/8/2010	3:53:43 PM	H2 MFC set to  0.000000
7/8/2010	3:53:43 PM	BCl3 MFC set to  0.000000
7/8/2010	3:53:43 PM	PHl3 MFC set to  0.000000
7/8/2010	3:53:43 PM	SiCl4 MFC set to  0.000000
7/8/2010	3:53:43 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	3:53:43 PM	Tube furnace set to 0
7/8/2010	3:53:44 PM	Run finished at 3:53 PM
7/8/2010	3:53:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	3:54:20 PM	Helium MFC set to  75.000000
7/8/2010	3:54:23 PM	Helium valve opened
7/8/2010	4:00:08 PM	Helium valve closed
7/8/2010	4:00:36 PM	Helium valve opened
7/8/2010	4:23:09 PM	Helium valve closed
7/8/2010	4:27:33 PM	Recipe started at 4:27 PM
7/8/2010	4:27:33 PM	Helium valve closed
7/8/2010	4:27:33 PM	BCl3 valve closed
7/8/2010	4:27:33 PM	PH3 valve closed
7/8/2010	4:27:33 PM	SiCl4 pre valve closed
7/8/2010	4:27:33 PM	SiCl4 post valve closed
7/8/2010	4:27:33 PM	Main Vac valve closed
7/8/2010	4:27:33 PM	Bypass valve closed
7/8/2010	4:27:33 PM	Bubbler valve closed
7/8/2010	4:27:33 PM	H2 valve opened
7/8/2010	4:27:33 PM	Helium MFC set to  0.000000
7/8/2010	4:27:33 PM	H2 MFC set to  500.000000
7/8/2010	4:27:33 PM	BCl3 MFC set to  0.000000
7/8/2010	4:27:33 PM	PHl3 MFC set to  0.000000
7/8/2010	4:27:33 PM	SiCl4 MFC set to  0.000000
7/8/2010	4:27:33 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	4:27:34 PM	Tube furnace set to 1000
7/8/2010	4:28:54 PM	Helium valve closed
7/8/2010	4:28:54 PM	BCl3 valve closed
7/8/2010	4:28:54 PM	PH3 valve closed
7/8/2010	4:28:54 PM	SiCl4 pre valve closed
7/8/2010	4:28:54 PM	SiCl4 post valve closed
7/8/2010	4:28:54 PM	Main Vac valve closed
7/8/2010	4:28:54 PM	Bypass valve closed
7/8/2010	4:28:54 PM	H2 valve opened
7/8/2010	4:28:54 PM	Bubbler valve opened
7/8/2010	4:28:54 PM	Helium MFC set to  0.000000
7/8/2010	4:28:54 PM	H2 MFC set to  500.000000
7/8/2010	4:28:54 PM	BCl3 MFC set to  0.000000
7/8/2010	4:28:54 PM	PHl3 MFC set to  0.000000
7/8/2010	4:28:54 PM	SiCl4 MFC set to  0.000000
7/8/2010	4:28:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	4:28:54 PM	Tube furnace set to 1000
7/8/2010	4:48:54 PM	Helium valve closed
7/8/2010	4:48:54 PM	BCl3 valve closed
7/8/2010	4:48:54 PM	PH3 valve closed
7/8/2010	4:48:54 PM	Main Vac valve closed
7/8/2010	4:48:54 PM	Bypass valve closed
7/8/2010	4:48:54 PM	H2 valve opened
7/8/2010	4:48:54 PM	SiCl4 pre valve opened
7/8/2010	4:48:54 PM	SiCl4 post valve opened
7/8/2010	4:48:54 PM	Bubbler valve opened
7/8/2010	4:48:54 PM	Helium MFC set to  0.000000
7/8/2010	4:48:54 PM	H2 MFC set to  500.000000
7/8/2010	4:48:54 PM	BCl3 MFC set to  0.000000
7/8/2010	4:48:54 PM	PHl3 MFC set to  0.000000
7/8/2010	4:48:54 PM	SiCl4 MFC set to  50.000000
7/8/2010	4:48:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	4:48:54 PM	Tube furnace set to 1000
7/8/2010	5:03:54 PM	Helium valve closed
7/8/2010	5:03:54 PM	BCl3 valve closed
7/8/2010	5:03:54 PM	PH3 valve closed
7/8/2010	5:03:54 PM	SiCl4 pre valve closed
7/8/2010	5:03:54 PM	SiCl4 post valve closed
7/8/2010	5:03:54 PM	Main Vac valve closed
7/8/2010	5:03:54 PM	Bypass valve closed
7/8/2010	5:03:54 PM	H2 valve opened
7/8/2010	5:03:54 PM	Bubbler valve opened
7/8/2010	5:03:54 PM	Helium MFC set to  0.000000
7/8/2010	5:03:54 PM	H2 MFC set to  500.000000
7/8/2010	5:03:54 PM	BCl3 MFC set to  0.000000
7/8/2010	5:03:54 PM	PHl3 MFC set to  0.000000
7/8/2010	5:03:54 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:03:54 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:03:54 PM	Tube furnace set to 750
7/8/2010	5:20:45 PM	H2 valve closed
7/8/2010	5:20:45 PM	BCl3 valve closed
7/8/2010	5:20:45 PM	PH3 valve closed
7/8/2010	5:20:45 PM	SiCl4 pre valve closed
7/8/2010	5:20:45 PM	SiCl4 post valve closed
7/8/2010	5:20:45 PM	Main Vac valve closed
7/8/2010	5:20:45 PM	Bypass valve closed
7/8/2010	5:20:45 PM	Helium valve opened
7/8/2010	5:20:45 PM	Bubbler valve opened
7/8/2010	5:20:45 PM	Helium MFC set to  500.000000
7/8/2010	5:20:45 PM	H2 MFC set to  0.000000
7/8/2010	5:20:45 PM	BCl3 MFC set to  0.000000
7/8/2010	5:20:45 PM	PHl3 MFC set to  0.000000
7/8/2010	5:20:45 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:20:45 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:20:45 PM	Tube furnace set to 0
7/8/2010	5:30:04 PM	Run aborted at 5:30 PM
7/8/2010	5:30:04 PM	Helium valve closed
7/8/2010	5:30:04 PM	H2 valve closed
7/8/2010	5:30:04 PM	BCl3 valve closed
7/8/2010	5:30:04 PM	PH3 valve closed
7/8/2010	5:30:04 PM	SiCl4 pre valve closed
7/8/2010	5:30:04 PM	SiCl4 post valve closed
7/8/2010	5:30:04 PM	Bypass valve closed
7/8/2010	5:30:04 PM	Main Vac valve closed
7/8/2010	5:30:04 PM	Bubbler valve closed
7/8/2010	5:30:04 PM	Helium MFC set to  0.000000
7/8/2010	5:30:04 PM	H2 MFC set to  0.000000
7/8/2010	5:30:04 PM	BCl3 MFC set to  0.000000
7/8/2010	5:30:04 PM	PHl3 MFC set to  0.000000
7/8/2010	5:30:04 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:30:05 PM	Tube furnace set to 0
7/8/2010	5:30:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/8/2010	5:30:16 PM	Recipe started at 5:30 PM
7/8/2010	5:30:16 PM	H2 valve closed
7/8/2010	5:30:16 PM	BCl3 valve closed
7/8/2010	5:30:16 PM	PH3 valve closed
7/8/2010	5:30:16 PM	SiCl4 pre valve closed
7/8/2010	5:30:16 PM	SiCl4 post valve closed
7/8/2010	5:30:16 PM	Main Vac valve closed
7/8/2010	5:30:16 PM	Bypass valve closed
7/8/2010	5:30:16 PM	Bubbler valve closed
7/8/2010	5:30:16 PM	Helium valve opened
7/8/2010	5:30:16 PM	Helium MFC set to  500.000000
7/8/2010	5:30:16 PM	H2 MFC set to  0.000000
7/8/2010	5:30:16 PM	BCl3 MFC set to  0.000000
7/8/2010	5:30:16 PM	PHl3 MFC set to  0.000000
7/8/2010	5:30:16 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:30:16 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:30:16 PM	Tube furnace set to 0
7/8/2010	5:30:17 PM	Helium valve closed
7/8/2010	5:30:17 PM	H2 valve closed
7/8/2010	5:30:17 PM	BCl3 valve closed
7/8/2010	5:30:17 PM	PH3 valve closed
7/8/2010	5:30:17 PM	SiCl4 pre valve closed
7/8/2010	5:30:17 PM	SiCl4 post valve closed
7/8/2010	5:30:17 PM	Main Vac valve closed
7/8/2010	5:30:17 PM	Bypass valve closed
7/8/2010	5:30:17 PM	Bubbler valve closed
7/8/2010	5:30:17 PM	Helium MFC set to  0.000000
7/8/2010	5:30:17 PM	H2 MFC set to  0.000000
7/8/2010	5:30:17 PM	BCl3 MFC set to  0.000000
7/8/2010	5:30:17 PM	PHl3 MFC set to  0.000000
7/8/2010	5:30:17 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:30:17 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:30:17 PM	Tube furnace set to 0
7/8/2010	5:30:26 PM	Helium valve closed
7/8/2010	5:30:26 PM	H2 valve closed
7/8/2010	5:30:26 PM	BCl3 valve closed
7/8/2010	5:30:26 PM	PH3 valve closed
7/8/2010	5:30:26 PM	SiCl4 pre valve closed
7/8/2010	5:30:26 PM	SiCl4 post valve closed
7/8/2010	5:30:26 PM	Main Vac valve closed
7/8/2010	5:30:26 PM	Bubbler valve closed
7/8/2010	5:30:26 PM	Bypass valve opened
7/8/2010	5:30:26 PM	Helium MFC set to  0.000000
7/8/2010	5:30:26 PM	H2 MFC set to  0.000000
7/8/2010	5:30:26 PM	BCl3 MFC set to  0.000000
7/8/2010	5:30:26 PM	PHl3 MFC set to  0.000000
7/8/2010	5:30:26 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:30:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:30:26 PM	Tube furnace set to 0
7/8/2010	5:31:07 PM	Helium valve closed
7/8/2010	5:31:07 PM	H2 valve closed
7/8/2010	5:31:07 PM	BCl3 valve closed
7/8/2010	5:31:07 PM	PH3 valve closed
7/8/2010	5:31:07 PM	SiCl4 pre valve closed
7/8/2010	5:31:07 PM	SiCl4 post valve closed
7/8/2010	5:31:07 PM	Bubbler valve closed
7/8/2010	5:31:07 PM	Main Vac valve opened
7/8/2010	5:31:07 PM	Bypass valve opened
7/8/2010	5:31:07 PM	Helium MFC set to  0.000000
7/8/2010	5:31:07 PM	H2 MFC set to  0.000000
7/8/2010	5:31:07 PM	BCl3 MFC set to  0.000000
7/8/2010	5:31:07 PM	PHl3 MFC set to  0.000000
7/8/2010	5:31:07 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:31:07 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:31:07 PM	Tube furnace set to 0
7/8/2010	5:36:07 PM	H2 valve closed
7/8/2010	5:36:07 PM	BCl3 valve closed
7/8/2010	5:36:07 PM	PH3 valve closed
7/8/2010	5:36:07 PM	SiCl4 pre valve closed
7/8/2010	5:36:07 PM	SiCl4 post valve closed
7/8/2010	5:36:07 PM	Main Vac valve closed
7/8/2010	5:36:07 PM	Bypass valve closed
7/8/2010	5:36:07 PM	Bubbler valve closed
7/8/2010	5:36:07 PM	Helium valve opened
7/8/2010	5:36:07 PM	Helium MFC set to  500.000000
7/8/2010	5:36:07 PM	H2 MFC set to  0.000000
7/8/2010	5:36:07 PM	BCl3 MFC set to  0.000000
7/8/2010	5:36:07 PM	PHl3 MFC set to  0.000000
7/8/2010	5:36:07 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:36:07 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:36:07 PM	Tube furnace set to 0
7/8/2010	5:37:27 PM	Helium valve closed
7/8/2010	5:37:27 PM	H2 valve closed
7/8/2010	5:37:27 PM	BCl3 valve closed
7/8/2010	5:37:27 PM	PH3 valve closed
7/8/2010	5:37:27 PM	SiCl4 pre valve closed
7/8/2010	5:37:27 PM	SiCl4 post valve closed
7/8/2010	5:37:27 PM	Main Vac valve closed
7/8/2010	5:37:27 PM	Bypass valve closed
7/8/2010	5:37:27 PM	Bubbler valve closed
7/8/2010	5:37:27 PM	Helium MFC set to  0.000000
7/8/2010	5:37:27 PM	H2 MFC set to  0.000000
7/8/2010	5:37:27 PM	BCl3 MFC set to  0.000000
7/8/2010	5:37:27 PM	PHl3 MFC set to  0.000000
7/8/2010	5:37:27 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:37:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:37:28 PM	Tube furnace set to 0
7/8/2010	5:37:43 PM	Helium valve closed
7/8/2010	5:37:43 PM	H2 valve closed
7/8/2010	5:37:43 PM	BCl3 valve closed
7/8/2010	5:37:43 PM	PH3 valve closed
7/8/2010	5:37:43 PM	SiCl4 pre valve closed
7/8/2010	5:37:43 PM	SiCl4 post valve closed
7/8/2010	5:37:43 PM	Main Vac valve closed
7/8/2010	5:37:43 PM	Bubbler valve closed
7/8/2010	5:37:43 PM	Bypass valve opened
7/8/2010	5:37:43 PM	Helium MFC set to  0.000000
7/8/2010	5:37:43 PM	H2 MFC set to  0.000000
7/8/2010	5:37:43 PM	BCl3 MFC set to  0.000000
7/8/2010	5:37:43 PM	PHl3 MFC set to  0.000000
7/8/2010	5:37:43 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:37:43 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:37:43 PM	Tube furnace set to 0
7/8/2010	5:38:16 PM	Helium valve closed
7/8/2010	5:38:16 PM	H2 valve closed
7/8/2010	5:38:16 PM	BCl3 valve closed
7/8/2010	5:38:16 PM	PH3 valve closed
7/8/2010	5:38:16 PM	SiCl4 pre valve closed
7/8/2010	5:38:16 PM	SiCl4 post valve closed
7/8/2010	5:38:16 PM	Bubbler valve closed
7/8/2010	5:38:16 PM	Main Vac valve opened
7/8/2010	5:38:16 PM	Bypass valve opened
7/8/2010	5:38:16 PM	Helium MFC set to  0.000000
7/8/2010	5:38:16 PM	H2 MFC set to  0.000000
7/8/2010	5:38:16 PM	BCl3 MFC set to  0.000000
7/8/2010	5:38:16 PM	PHl3 MFC set to  0.000000
7/8/2010	5:38:16 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:38:16 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:38:16 PM	Tube furnace set to 0
7/8/2010	5:43:16 PM	H2 valve closed
7/8/2010	5:43:16 PM	BCl3 valve closed
7/8/2010	5:43:16 PM	PH3 valve closed
7/8/2010	5:43:16 PM	SiCl4 pre valve closed
7/8/2010	5:43:16 PM	SiCl4 post valve closed
7/8/2010	5:43:16 PM	Main Vac valve closed
7/8/2010	5:43:16 PM	Bypass valve closed
7/8/2010	5:43:16 PM	Bubbler valve closed
7/8/2010	5:43:16 PM	Helium valve opened
7/8/2010	5:43:16 PM	Helium MFC set to  500.000000
7/8/2010	5:43:16 PM	H2 MFC set to  0.000000
7/8/2010	5:43:16 PM	BCl3 MFC set to  0.000000
7/8/2010	5:43:16 PM	PHl3 MFC set to  0.000000
7/8/2010	5:43:16 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:43:16 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:43:17 PM	Tube furnace set to 0
7/8/2010	5:44:37 PM	Helium valve closed
7/8/2010	5:44:37 PM	H2 valve closed
7/8/2010	5:44:37 PM	BCl3 valve closed
7/8/2010	5:44:37 PM	PH3 valve closed
7/8/2010	5:44:37 PM	SiCl4 pre valve closed
7/8/2010	5:44:37 PM	SiCl4 post valve closed
7/8/2010	5:44:37 PM	Main Vac valve closed
7/8/2010	5:44:37 PM	Bypass valve closed
7/8/2010	5:44:37 PM	Bubbler valve closed
7/8/2010	5:44:37 PM	Helium MFC set to  0.000000
7/8/2010	5:44:37 PM	H2 MFC set to  0.000000
7/8/2010	5:44:37 PM	BCl3 MFC set to  0.000000
7/8/2010	5:44:37 PM	PHl3 MFC set to  0.000000
7/8/2010	5:44:37 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:44:37 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:44:38 PM	Tube furnace set to 0
7/8/2010	5:44:53 PM	Helium valve closed
7/8/2010	5:44:53 PM	H2 valve closed
7/8/2010	5:44:53 PM	BCl3 valve closed
7/8/2010	5:44:53 PM	PH3 valve closed
7/8/2010	5:44:53 PM	SiCl4 pre valve closed
7/8/2010	5:44:53 PM	SiCl4 post valve closed
7/8/2010	5:44:53 PM	Main Vac valve closed
7/8/2010	5:44:53 PM	Bubbler valve closed
7/8/2010	5:44:53 PM	Bypass valve opened
7/8/2010	5:44:53 PM	Helium MFC set to  0.000000
7/8/2010	5:44:53 PM	H2 MFC set to  0.000000
7/8/2010	5:44:53 PM	BCl3 MFC set to  0.000000
7/8/2010	5:44:53 PM	PHl3 MFC set to  0.000000
7/8/2010	5:44:53 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:44:53 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:44:53 PM	Tube furnace set to 0
7/8/2010	5:45:26 PM	Helium valve closed
7/8/2010	5:45:27 PM	H2 valve closed
7/8/2010	5:45:27 PM	BCl3 valve closed
7/8/2010	5:45:27 PM	PH3 valve closed
7/8/2010	5:45:27 PM	SiCl4 pre valve closed
7/8/2010	5:45:27 PM	SiCl4 post valve closed
7/8/2010	5:45:27 PM	Bubbler valve closed
7/8/2010	5:45:27 PM	Main Vac valve opened
7/8/2010	5:45:27 PM	Bypass valve opened
7/8/2010	5:45:27 PM	Helium MFC set to  0.000000
7/8/2010	5:45:27 PM	H2 MFC set to  0.000000
7/8/2010	5:45:27 PM	BCl3 MFC set to  0.000000
7/8/2010	5:45:27 PM	PHl3 MFC set to  0.000000
7/8/2010	5:45:27 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:45:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:45:27 PM	Tube furnace set to 0
7/8/2010	5:50:27 PM	Helium valve closed
7/8/2010	5:50:27 PM	H2 valve closed
7/8/2010	5:50:27 PM	BCl3 valve closed
7/8/2010	5:50:27 PM	PH3 valve closed
7/8/2010	5:50:27 PM	SiCl4 pre valve closed
7/8/2010	5:50:27 PM	SiCl4 post valve closed
7/8/2010	5:50:27 PM	Bubbler valve closed
7/8/2010	5:50:27 PM	Main Vac valve opened
7/8/2010	5:50:27 PM	Bypass valve opened
7/8/2010	5:50:27 PM	Helium MFC set to  0.000000
7/8/2010	5:50:27 PM	H2 MFC set to  0.000000
7/8/2010	5:50:27 PM	BCl3 MFC set to  0.000000
7/8/2010	5:50:27 PM	PHl3 MFC set to  0.000000
7/8/2010	5:50:27 PM	SiCl4 MFC set to  0.000000
7/8/2010	5:50:27 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	5:50:27 PM	Tube furnace set to 0
7/8/2010	5:50:28 PM	Run finished at 5:50 PM
7/8/2010	5:50:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
7/8/2010	8:06:58 PM	Recipe started at 8:06 PM
7/8/2010	8:06:58 PM	Helium valve closed
7/8/2010	8:06:58 PM	BCl3 valve closed
7/8/2010	8:06:58 PM	PH3 valve closed
7/8/2010	8:06:58 PM	SiCl4 pre valve closed
7/8/2010	8:06:58 PM	SiCl4 post valve closed
7/8/2010	8:06:58 PM	Main Vac valve closed
7/8/2010	8:06:58 PM	Bypass valve closed
7/8/2010	8:06:58 PM	Bubbler valve closed
7/8/2010	8:06:58 PM	H2 valve opened
7/8/2010	8:06:58 PM	Helium MFC set to  0.000000
7/8/2010	8:06:58 PM	H2 MFC set to  500.000000
7/8/2010	8:06:58 PM	BCl3 MFC set to  0.000000
7/8/2010	8:06:58 PM	PHl3 MFC set to  0.000000
7/8/2010	8:06:58 PM	SiCl4 MFC set to  0.000000
7/8/2010	8:06:58 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	8:06:58 PM	Tube furnace set to 1000
7/8/2010	8:08:20 PM	Helium valve closed
7/8/2010	8:08:20 PM	BCl3 valve closed
7/8/2010	8:08:20 PM	PH3 valve closed
7/8/2010	8:08:20 PM	SiCl4 pre valve closed
7/8/2010	8:08:20 PM	SiCl4 post valve closed
7/8/2010	8:08:20 PM	Main Vac valve closed
7/8/2010	8:08:20 PM	Bypass valve closed
7/8/2010	8:08:20 PM	H2 valve opened
7/8/2010	8:08:20 PM	Bubbler valve opened
7/8/2010	8:08:20 PM	Helium MFC set to  0.000000
7/8/2010	8:08:20 PM	H2 MFC set to  500.000000
7/8/2010	8:08:20 PM	BCl3 MFC set to  0.000000
7/8/2010	8:08:20 PM	PHl3 MFC set to  0.000000
7/8/2010	8:08:20 PM	SiCl4 MFC set to  0.000000
7/8/2010	8:08:20 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	8:08:21 PM	Tube furnace set to 1000
7/8/2010	8:28:20 PM	Helium valve closed
7/8/2010	8:28:20 PM	BCl3 valve closed
7/8/2010	8:28:20 PM	PH3 valve closed
7/8/2010	8:28:20 PM	Main Vac valve closed
7/8/2010	8:28:20 PM	Bypass valve closed
7/8/2010	8:28:20 PM	H2 valve opened
7/8/2010	8:28:21 PM	SiCl4 pre valve opened
7/8/2010	8:28:21 PM	SiCl4 post valve opened
7/8/2010	8:28:21 PM	Bubbler valve opened
7/8/2010	8:28:21 PM	Helium MFC set to  0.000000
7/8/2010	8:28:21 PM	H2 MFC set to  500.000000
7/8/2010	8:28:21 PM	BCl3 MFC set to  0.000000
7/8/2010	8:28:21 PM	PHl3 MFC set to  0.000000
7/8/2010	8:28:21 PM	SiCl4 MFC set to  45.000000
7/8/2010	8:28:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	8:28:21 PM	Tube furnace set to 1000
7/8/2010	8:43:21 PM	Helium valve closed
7/8/2010	8:43:21 PM	BCl3 valve closed
7/8/2010	8:43:21 PM	PH3 valve closed
7/8/2010	8:43:21 PM	SiCl4 pre valve closed
7/8/2010	8:43:21 PM	SiCl4 post valve closed
7/8/2010	8:43:21 PM	Main Vac valve closed
7/8/2010	8:43:21 PM	Bypass valve closed
7/8/2010	8:43:21 PM	H2 valve opened
7/8/2010	8:43:21 PM	Bubbler valve opened
7/8/2010	8:43:21 PM	Helium MFC set to  0.000000
7/8/2010	8:43:21 PM	H2 MFC set to  500.000000
7/8/2010	8:43:21 PM	BCl3 MFC set to  0.000000
7/8/2010	8:43:21 PM	PHl3 MFC set to  0.000000
7/8/2010	8:43:21 PM	SiCl4 MFC set to  0.000000
7/8/2010	8:43:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	8:43:21 PM	Tube furnace set to 750
7/8/2010	9:03:21 PM	H2 valve closed
7/8/2010	9:03:21 PM	BCl3 valve closed
7/8/2010	9:03:21 PM	PH3 valve closed
7/8/2010	9:03:21 PM	SiCl4 pre valve closed
7/8/2010	9:03:21 PM	SiCl4 post valve closed
7/8/2010	9:03:21 PM	Main Vac valve closed
7/8/2010	9:03:21 PM	Bypass valve closed
7/8/2010	9:03:21 PM	Helium valve opened
7/8/2010	9:03:21 PM	Bubbler valve opened
7/8/2010	9:03:21 PM	Helium MFC set to  500.000000
7/8/2010	9:03:21 PM	H2 MFC set to  0.000000
7/8/2010	9:03:21 PM	BCl3 MFC set to  0.000000
7/8/2010	9:03:21 PM	PHl3 MFC set to  0.000000
7/8/2010	9:03:21 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:03:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:03:21 PM	Tube furnace set to 0
7/8/2010	9:23:21 PM	Helium valve closed
7/8/2010	9:23:21 PM	H2 valve closed
7/8/2010	9:23:21 PM	BCl3 valve closed
7/8/2010	9:23:21 PM	PH3 valve closed
7/8/2010	9:23:21 PM	SiCl4 pre valve closed
7/8/2010	9:23:21 PM	SiCl4 post valve closed
7/8/2010	9:23:21 PM	Main Vac valve closed
7/8/2010	9:23:21 PM	Bypass valve closed
7/8/2010	9:23:21 PM	Bubbler valve closed
7/8/2010	9:23:21 PM	Helium MFC set to  0.000000
7/8/2010	9:23:21 PM	H2 MFC set to  0.000000
7/8/2010	9:23:21 PM	BCl3 MFC set to  0.000000
7/8/2010	9:23:21 PM	PHl3 MFC set to  0.000000
7/8/2010	9:23:21 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:23:21 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:23:21 PM	Tube furnace set to 0
7/8/2010	9:23:21 PM	Run finished at 9:23 PM
7/8/2010	9:43:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	9:43:37 PM	Recipe started at 9:43 PM
7/8/2010	9:43:37 PM	Helium valve closed
7/8/2010	9:43:37 PM	H2 valve closed
7/8/2010	9:43:37 PM	BCl3 valve closed
7/8/2010	9:43:37 PM	PH3 valve closed
7/8/2010	9:43:37 PM	SiCl4 pre valve closed
7/8/2010	9:43:37 PM	SiCl4 post valve closed
7/8/2010	9:43:37 PM	Main Vac valve closed
7/8/2010	9:43:37 PM	Bubbler valve closed
7/8/2010	9:43:37 PM	Bypass valve opened
7/8/2010	9:43:37 PM	Helium MFC set to  0.000000
7/8/2010	9:43:37 PM	H2 MFC set to  0.000000
7/8/2010	9:43:37 PM	BCl3 MFC set to  0.000000
7/8/2010	9:43:37 PM	PHl3 MFC set to  0.000000
7/8/2010	9:43:37 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:43:38 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:43:38 PM	Tube furnace set to 0
7/8/2010	9:44:26 PM	Helium valve closed
7/8/2010	9:44:26 PM	H2 valve closed
7/8/2010	9:44:26 PM	BCl3 valve closed
7/8/2010	9:44:26 PM	PH3 valve closed
7/8/2010	9:44:26 PM	SiCl4 pre valve closed
7/8/2010	9:44:26 PM	SiCl4 post valve closed
7/8/2010	9:44:26 PM	Bubbler valve closed
7/8/2010	9:44:26 PM	Main Vac valve opened
7/8/2010	9:44:26 PM	Bypass valve opened
7/8/2010	9:44:26 PM	Helium MFC set to  0.000000
7/8/2010	9:44:26 PM	H2 MFC set to  0.000000
7/8/2010	9:44:26 PM	BCl3 MFC set to  0.000000
7/8/2010	9:44:26 PM	PHl3 MFC set to  0.000000
7/8/2010	9:44:26 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:44:26 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:44:27 PM	Tube furnace set to 0
7/8/2010	9:44:27 PM	Run finished at 9:44 PM
7/8/2010	9:44:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/8/2010	9:45:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/8/2010	9:45:07 PM	Recipe started at 9:45 PM
7/8/2010	9:45:07 PM	Helium valve closed
7/8/2010	9:45:07 PM	H2 valve closed
7/8/2010	9:45:07 PM	BCl3 valve closed
7/8/2010	9:45:07 PM	PH3 valve closed
7/8/2010	9:45:07 PM	SiCl4 pre valve closed
7/8/2010	9:45:07 PM	SiCl4 post valve closed
7/8/2010	9:45:07 PM	Main Vac valve closed
7/8/2010	9:45:07 PM	Bubbler valve closed
7/8/2010	9:45:07 PM	Bypass valve opened
7/8/2010	9:45:07 PM	Helium MFC set to  0.000000
7/8/2010	9:45:07 PM	H2 MFC set to  0.000000
7/8/2010	9:45:07 PM	BCl3 MFC set to  0.000000
7/8/2010	9:45:07 PM	PHl3 MFC set to  0.000000
7/8/2010	9:45:07 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:45:07 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:45:08 PM	Tube furnace set to 0
7/8/2010	9:45:08 PM	Helium valve closed
7/8/2010	9:45:08 PM	H2 valve closed
7/8/2010	9:45:08 PM	BCl3 valve closed
7/8/2010	9:45:08 PM	PH3 valve closed
7/8/2010	9:45:08 PM	SiCl4 pre valve closed
7/8/2010	9:45:08 PM	SiCl4 post valve closed
7/8/2010	9:45:08 PM	Bubbler valve closed
7/8/2010	9:45:08 PM	Main Vac valve opened
7/8/2010	9:45:08 PM	Bypass valve opened
7/8/2010	9:45:08 PM	Helium MFC set to  0.000000
7/8/2010	9:45:08 PM	H2 MFC set to  0.000000
7/8/2010	9:45:08 PM	BCl3 MFC set to  0.000000
7/8/2010	9:45:08 PM	PHl3 MFC set to  0.000000
7/8/2010	9:45:08 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:45:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:45:08 PM	Tube furnace set to 0
7/8/2010	9:46:08 PM	H2 valve closed
7/8/2010	9:46:08 PM	BCl3 valve closed
7/8/2010	9:46:08 PM	PH3 valve closed
7/8/2010	9:46:08 PM	SiCl4 pre valve closed
7/8/2010	9:46:08 PM	SiCl4 post valve closed
7/8/2010	9:46:08 PM	Bubbler valve closed
7/8/2010	9:46:08 PM	Helium valve opened
7/8/2010	9:46:08 PM	Main Vac valve opened
7/8/2010	9:46:08 PM	Bypass valve opened
7/8/2010	9:46:08 PM	Helium MFC set to  100.000000
7/8/2010	9:46:08 PM	H2 MFC set to  0.000000
7/8/2010	9:46:08 PM	BCl3 MFC set to  0.000000
7/8/2010	9:46:08 PM	PHl3 MFC set to  0.000000
7/8/2010	9:46:08 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:46:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:46:08 PM	Tube furnace set to 0
7/8/2010	9:55:08 PM	Helium valve closed
7/8/2010	9:55:08 PM	H2 valve closed
7/8/2010	9:55:08 PM	BCl3 valve closed
7/8/2010	9:55:08 PM	PH3 valve closed
7/8/2010	9:55:08 PM	SiCl4 pre valve closed
7/8/2010	9:55:08 PM	SiCl4 post valve closed
7/8/2010	9:55:08 PM	Bubbler valve closed
7/8/2010	9:55:08 PM	Main Vac valve opened
7/8/2010	9:55:08 PM	Bypass valve opened
7/8/2010	9:55:08 PM	Helium MFC set to  0.000000
7/8/2010	9:55:08 PM	H2 MFC set to  0.000000
7/8/2010	9:55:08 PM	BCl3 MFC set to  0.000000
7/8/2010	9:55:08 PM	PHl3 MFC set to  0.000000
7/8/2010	9:55:08 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:55:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:55:08 PM	Tube furnace set to 0
7/8/2010	9:56:08 PM	H2 valve closed
7/8/2010	9:56:08 PM	BCl3 valve closed
7/8/2010	9:56:08 PM	PH3 valve closed
7/8/2010	9:56:08 PM	SiCl4 pre valve closed
7/8/2010	9:56:08 PM	SiCl4 post valve closed
7/8/2010	9:56:08 PM	Bubbler valve closed
7/8/2010	9:56:08 PM	Helium valve opened
7/8/2010	9:56:08 PM	Main Vac valve opened
7/8/2010	9:56:08 PM	Bypass valve opened
7/8/2010	9:56:08 PM	Helium MFC set to  100.000000
7/8/2010	9:56:08 PM	H2 MFC set to  0.000000
7/8/2010	9:56:08 PM	BCl3 MFC set to  0.000000
7/8/2010	9:56:08 PM	PHl3 MFC set to  0.000000
7/8/2010	9:56:08 PM	SiCl4 MFC set to  0.000000
7/8/2010	9:56:08 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	9:56:09 PM	Tube furnace set to 0
7/8/2010	10:05:09 PM	Helium valve closed
7/8/2010	10:05:09 PM	H2 valve closed
7/8/2010	10:05:09 PM	BCl3 valve closed
7/8/2010	10:05:09 PM	PH3 valve closed
7/8/2010	10:05:09 PM	SiCl4 pre valve closed
7/8/2010	10:05:09 PM	SiCl4 post valve closed
7/8/2010	10:05:09 PM	Bubbler valve closed
7/8/2010	10:05:09 PM	Main Vac valve opened
7/8/2010	10:05:09 PM	Bypass valve opened
7/8/2010	10:05:09 PM	Helium MFC set to  0.000000
7/8/2010	10:05:09 PM	H2 MFC set to  0.000000
7/8/2010	10:05:09 PM	BCl3 MFC set to  0.000000
7/8/2010	10:05:09 PM	PHl3 MFC set to  0.000000
7/8/2010	10:05:09 PM	SiCl4 MFC set to  0.000000
7/8/2010	10:05:09 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:05:09 PM	Tube furnace set to 0
7/8/2010	10:06:09 PM	H2 valve closed
7/8/2010	10:06:09 PM	BCl3 valve closed
7/8/2010	10:06:09 PM	PH3 valve closed
7/8/2010	10:06:09 PM	SiCl4 pre valve closed
7/8/2010	10:06:09 PM	SiCl4 post valve closed
7/8/2010	10:06:09 PM	Bubbler valve closed
7/8/2010	10:06:09 PM	Helium valve opened
7/8/2010	10:06:09 PM	Main Vac valve opened
7/8/2010	10:06:09 PM	Bypass valve opened
7/8/2010	10:06:09 PM	Helium MFC set to  100.000000
7/8/2010	10:06:09 PM	H2 MFC set to  0.000000
7/8/2010	10:06:09 PM	BCl3 MFC set to  0.000000
7/8/2010	10:06:09 PM	PHl3 MFC set to  0.000000
7/8/2010	10:06:09 PM	SiCl4 MFC set to  0.000000
7/8/2010	10:06:09 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:06:09 PM	Tube furnace set to 0
7/8/2010	10:13:12 PM	Helium valve closed
7/8/2010	10:13:12 PM	H2 valve closed
7/8/2010	10:13:12 PM	BCl3 valve closed
7/8/2010	10:13:12 PM	PH3 valve closed
7/8/2010	10:13:12 PM	SiCl4 pre valve closed
7/8/2010	10:13:12 PM	SiCl4 post valve closed
7/8/2010	10:13:12 PM	Bubbler valve closed
7/8/2010	10:13:12 PM	Main Vac valve opened
7/8/2010	10:13:12 PM	Bypass valve opened
7/8/2010	10:13:12 PM	Helium MFC set to  0.000000
7/8/2010	10:13:12 PM	H2 MFC set to  0.000000
7/8/2010	10:13:12 PM	BCl3 MFC set to  0.000000
7/8/2010	10:13:12 PM	PHl3 MFC set to  0.000000
7/8/2010	10:13:12 PM	SiCl4 MFC set to  0.000000
7/8/2010	10:13:12 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:13:12 PM	Tube furnace set to 0
7/8/2010	10:13:13 PM	Run finished at 10:13 PM
7/8/2010	10:13:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/8/2010	10:14:49 PM	Bypass valve closed
7/8/2010	10:14:49 PM	Main Vac valve closed
7/8/2010	10:14:55 PM	Main Vac valve opened
7/8/2010	10:14:56 PM	Bypass valve opened
7/8/2010	10:15:05 PM	Recipe started at 10:15 PM
7/8/2010	10:15:05 PM	Helium valve closed
7/8/2010	10:15:05 PM	BCl3 valve closed
7/8/2010	10:15:05 PM	PH3 valve closed
7/8/2010	10:15:05 PM	SiCl4 pre valve closed
7/8/2010	10:15:05 PM	SiCl4 post valve closed
7/8/2010	10:15:05 PM	Main Vac valve closed
7/8/2010	10:15:05 PM	Bypass valve closed
7/8/2010	10:15:05 PM	Bubbler valve closed
7/8/2010	10:15:05 PM	H2 valve opened
7/8/2010	10:15:05 PM	Helium MFC set to  0.000000
7/8/2010	10:15:05 PM	H2 MFC set to  500.000000
7/8/2010	10:15:05 PM	BCl3 MFC set to  0.000000
7/8/2010	10:15:05 PM	PHl3 MFC set to  0.000000
7/8/2010	10:15:05 PM	SiCl4 MFC set to  0.000000
7/8/2010	10:15:05 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:15:05 PM	Tube furnace set to 1000
7/8/2010	10:16:23 PM	Helium valve closed
7/8/2010	10:16:23 PM	BCl3 valve closed
7/8/2010	10:16:23 PM	PH3 valve closed
7/8/2010	10:16:23 PM	SiCl4 pre valve closed
7/8/2010	10:16:23 PM	SiCl4 post valve closed
7/8/2010	10:16:23 PM	Main Vac valve closed
7/8/2010	10:16:23 PM	Bypass valve closed
7/8/2010	10:16:23 PM	H2 valve opened
7/8/2010	10:16:23 PM	Bubbler valve opened
7/8/2010	10:16:23 PM	Helium MFC set to  0.000000
7/8/2010	10:16:23 PM	H2 MFC set to  500.000000
7/8/2010	10:16:23 PM	BCl3 MFC set to  0.000000
7/8/2010	10:16:23 PM	PHl3 MFC set to  0.000000
7/8/2010	10:16:23 PM	SiCl4 MFC set to  0.000000
7/8/2010	10:16:23 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:16:23 PM	Tube furnace set to 1000
7/8/2010	10:36:23 PM	Helium valve closed
7/8/2010	10:36:23 PM	BCl3 valve closed
7/8/2010	10:36:23 PM	PH3 valve closed
7/8/2010	10:36:23 PM	Main Vac valve closed
7/8/2010	10:36:23 PM	Bypass valve closed
7/8/2010	10:36:23 PM	H2 valve opened
7/8/2010	10:36:23 PM	SiCl4 pre valve opened
7/8/2010	10:36:23 PM	SiCl4 post valve opened
7/8/2010	10:36:23 PM	Bubbler valve opened
7/8/2010	10:36:23 PM	Helium MFC set to  0.000000
7/8/2010	10:36:23 PM	H2 MFC set to  500.000000
7/8/2010	10:36:23 PM	BCl3 MFC set to  0.000000
7/8/2010	10:36:23 PM	PHl3 MFC set to  0.000000
7/8/2010	10:36:23 PM	SiCl4 MFC set to  55.000000
7/8/2010	10:36:23 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:36:23 PM	Tube furnace set to 1000
7/8/2010	10:51:23 PM	Helium valve closed
7/8/2010	10:51:23 PM	BCl3 valve closed
7/8/2010	10:51:23 PM	PH3 valve closed
7/8/2010	10:51:23 PM	SiCl4 pre valve closed
7/8/2010	10:51:23 PM	SiCl4 post valve closed
7/8/2010	10:51:23 PM	Main Vac valve closed
7/8/2010	10:51:23 PM	Bypass valve closed
7/8/2010	10:51:23 PM	H2 valve opened
7/8/2010	10:51:23 PM	Bubbler valve opened
7/8/2010	10:51:23 PM	Helium MFC set to  0.000000
7/8/2010	10:51:23 PM	H2 MFC set to  500.000000
7/8/2010	10:51:23 PM	BCl3 MFC set to  0.000000
7/8/2010	10:51:23 PM	PHl3 MFC set to  0.000000
7/8/2010	10:51:23 PM	SiCl4 MFC set to  0.000000
7/8/2010	10:51:23 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	10:51:24 PM	Tube furnace set to 750
7/8/2010	11:11:24 PM	H2 valve closed
7/8/2010	11:11:24 PM	BCl3 valve closed
7/8/2010	11:11:24 PM	PH3 valve closed
7/8/2010	11:11:24 PM	SiCl4 pre valve closed
7/8/2010	11:11:24 PM	SiCl4 post valve closed
7/8/2010	11:11:24 PM	Main Vac valve closed
7/8/2010	11:11:24 PM	Bypass valve closed
7/8/2010	11:11:24 PM	Helium valve opened
7/8/2010	11:11:24 PM	Bubbler valve opened
7/8/2010	11:11:24 PM	Helium MFC set to  500.000000
7/8/2010	11:11:24 PM	H2 MFC set to  0.000000
7/8/2010	11:11:24 PM	BCl3 MFC set to  0.000000
7/8/2010	11:11:24 PM	PHl3 MFC set to  0.000000
7/8/2010	11:11:24 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:11:24 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:11:24 PM	Tube furnace set to 0
7/8/2010	11:23:25 PM	Helium valve closed
7/8/2010	11:23:25 PM	H2 valve closed
7/8/2010	11:23:25 PM	BCl3 valve closed
7/8/2010	11:23:25 PM	PH3 valve closed
7/8/2010	11:23:25 PM	SiCl4 pre valve closed
7/8/2010	11:23:25 PM	SiCl4 post valve closed
7/8/2010	11:23:25 PM	Main Vac valve closed
7/8/2010	11:23:25 PM	Bypass valve closed
7/8/2010	11:23:25 PM	Bubbler valve closed
7/8/2010	11:23:25 PM	Helium MFC set to  0.000000
7/8/2010	11:23:25 PM	H2 MFC set to  0.000000
7/8/2010	11:23:25 PM	BCl3 MFC set to  0.000000
7/8/2010	11:23:25 PM	PHl3 MFC set to  0.000000
7/8/2010	11:23:25 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:23:25 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:23:25 PM	Tube furnace set to 0
7/8/2010	11:23:25 PM	Run finished at 11:23 PM
7/8/2010	11:23:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/8/2010	11:23:35 PM	Recipe started at 11:23 PM
7/8/2010	11:23:35 PM	Helium valve closed
7/8/2010	11:23:35 PM	H2 valve closed
7/8/2010	11:23:35 PM	BCl3 valve closed
7/8/2010	11:23:35 PM	PH3 valve closed
7/8/2010	11:23:35 PM	SiCl4 pre valve closed
7/8/2010	11:23:35 PM	SiCl4 post valve closed
7/8/2010	11:23:35 PM	Main Vac valve closed
7/8/2010	11:23:35 PM	Bubbler valve closed
7/8/2010	11:23:35 PM	Bypass valve opened
7/8/2010	11:23:35 PM	Helium MFC set to  0.000000
7/8/2010	11:23:35 PM	H2 MFC set to  0.000000
7/8/2010	11:23:35 PM	BCl3 MFC set to  0.000000
7/8/2010	11:23:35 PM	PHl3 MFC set to  0.000000
7/8/2010	11:23:35 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:23:35 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:23:36 PM	Tube furnace set to 0
7/8/2010	11:24:17 PM	Helium valve closed
7/8/2010	11:24:17 PM	H2 valve closed
7/8/2010	11:24:17 PM	BCl3 valve closed
7/8/2010	11:24:17 PM	PH3 valve closed
7/8/2010	11:24:17 PM	SiCl4 pre valve closed
7/8/2010	11:24:17 PM	SiCl4 post valve closed
7/8/2010	11:24:17 PM	Bubbler valve closed
7/8/2010	11:24:17 PM	Main Vac valve opened
7/8/2010	11:24:17 PM	Bypass valve opened
7/8/2010	11:24:17 PM	Helium MFC set to  0.000000
7/8/2010	11:24:17 PM	H2 MFC set to  0.000000
7/8/2010	11:24:17 PM	BCl3 MFC set to  0.000000
7/8/2010	11:24:17 PM	PHl3 MFC set to  0.000000
7/8/2010	11:24:17 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:24:17 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:24:18 PM	Tube furnace set to 0
7/8/2010	11:25:18 PM	H2 valve closed
7/8/2010	11:25:18 PM	BCl3 valve closed
7/8/2010	11:25:18 PM	PH3 valve closed
7/8/2010	11:25:18 PM	SiCl4 pre valve closed
7/8/2010	11:25:18 PM	SiCl4 post valve closed
7/8/2010	11:25:18 PM	Bubbler valve closed
7/8/2010	11:25:18 PM	Helium valve opened
7/8/2010	11:25:18 PM	Main Vac valve opened
7/8/2010	11:25:18 PM	Bypass valve opened
7/8/2010	11:25:18 PM	Helium MFC set to  100.000000
7/8/2010	11:25:18 PM	H2 MFC set to  0.000000
7/8/2010	11:25:18 PM	BCl3 MFC set to  0.000000
7/8/2010	11:25:18 PM	PHl3 MFC set to  0.000000
7/8/2010	11:25:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:25:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:25:18 PM	Tube furnace set to 0
7/8/2010	11:34:18 PM	Helium valve closed
7/8/2010	11:34:18 PM	H2 valve closed
7/8/2010	11:34:18 PM	BCl3 valve closed
7/8/2010	11:34:18 PM	PH3 valve closed
7/8/2010	11:34:18 PM	SiCl4 pre valve closed
7/8/2010	11:34:18 PM	SiCl4 post valve closed
7/8/2010	11:34:18 PM	Bubbler valve closed
7/8/2010	11:34:18 PM	Main Vac valve opened
7/8/2010	11:34:18 PM	Bypass valve opened
7/8/2010	11:34:18 PM	Helium MFC set to  0.000000
7/8/2010	11:34:18 PM	H2 MFC set to  0.000000
7/8/2010	11:34:18 PM	BCl3 MFC set to  0.000000
7/8/2010	11:34:18 PM	PHl3 MFC set to  0.000000
7/8/2010	11:34:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:34:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:34:18 PM	Tube furnace set to 0
7/8/2010	11:35:18 PM	H2 valve closed
7/8/2010	11:35:18 PM	BCl3 valve closed
7/8/2010	11:35:18 PM	PH3 valve closed
7/8/2010	11:35:18 PM	SiCl4 pre valve closed
7/8/2010	11:35:18 PM	SiCl4 post valve closed
7/8/2010	11:35:18 PM	Bubbler valve closed
7/8/2010	11:35:18 PM	Helium valve opened
7/8/2010	11:35:18 PM	Main Vac valve opened
7/8/2010	11:35:18 PM	Bypass valve opened
7/8/2010	11:35:18 PM	Helium MFC set to  100.000000
7/8/2010	11:35:18 PM	H2 MFC set to  0.000000
7/8/2010	11:35:18 PM	BCl3 MFC set to  0.000000
7/8/2010	11:35:18 PM	PHl3 MFC set to  0.000000
7/8/2010	11:35:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:35:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:35:18 PM	Tube furnace set to 0
7/8/2010	11:44:18 PM	Helium valve closed
7/8/2010	11:44:18 PM	H2 valve closed
7/8/2010	11:44:18 PM	BCl3 valve closed
7/8/2010	11:44:18 PM	PH3 valve closed
7/8/2010	11:44:18 PM	SiCl4 pre valve closed
7/8/2010	11:44:18 PM	SiCl4 post valve closed
7/8/2010	11:44:18 PM	Bubbler valve closed
7/8/2010	11:44:18 PM	Main Vac valve opened
7/8/2010	11:44:18 PM	Bypass valve opened
7/8/2010	11:44:18 PM	Helium MFC set to  0.000000
7/8/2010	11:44:18 PM	H2 MFC set to  0.000000
7/8/2010	11:44:18 PM	BCl3 MFC set to  0.000000
7/8/2010	11:44:18 PM	PHl3 MFC set to  0.000000
7/8/2010	11:44:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:44:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:44:18 PM	Tube furnace set to 0
7/8/2010	11:45:18 PM	H2 valve closed
7/8/2010	11:45:18 PM	BCl3 valve closed
7/8/2010	11:45:18 PM	PH3 valve closed
7/8/2010	11:45:18 PM	SiCl4 pre valve closed
7/8/2010	11:45:18 PM	SiCl4 post valve closed
7/8/2010	11:45:18 PM	Bubbler valve closed
7/8/2010	11:45:18 PM	Helium valve opened
7/8/2010	11:45:18 PM	Main Vac valve opened
7/8/2010	11:45:18 PM	Bypass valve opened
7/8/2010	11:45:18 PM	Helium MFC set to  100.000000
7/8/2010	11:45:18 PM	H2 MFC set to  0.000000
7/8/2010	11:45:18 PM	BCl3 MFC set to  0.000000
7/8/2010	11:45:18 PM	PHl3 MFC set to  0.000000
7/8/2010	11:45:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:45:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:45:18 PM	Tube furnace set to 0
7/8/2010	11:54:18 PM	Helium valve closed
7/8/2010	11:54:18 PM	H2 valve closed
7/8/2010	11:54:18 PM	BCl3 valve closed
7/8/2010	11:54:18 PM	PH3 valve closed
7/8/2010	11:54:18 PM	SiCl4 pre valve closed
7/8/2010	11:54:18 PM	SiCl4 post valve closed
7/8/2010	11:54:18 PM	Bubbler valve closed
7/8/2010	11:54:18 PM	Main Vac valve opened
7/8/2010	11:54:18 PM	Bypass valve opened
7/8/2010	11:54:18 PM	Helium MFC set to  0.000000
7/8/2010	11:54:18 PM	H2 MFC set to  0.000000
7/8/2010	11:54:18 PM	BCl3 MFC set to  0.000000
7/8/2010	11:54:18 PM	PHl3 MFC set to  0.000000
7/8/2010	11:54:18 PM	SiCl4 MFC set to  0.000000
7/8/2010	11:54:18 PM	Bypass solenoid MFC set to  0.000000
7/8/2010	11:54:19 PM	Tube furnace set to 0
7/8/2010	11:54:20 PM	Run finished at 11:54 PM
7/8/2010	11:54:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
